发明名称 |
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device |
摘要 |
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
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申请公布号 |
US5844666(A) |
申请公布日期 |
1998.12.01 |
申请号 |
US19960642014 |
申请日期 |
1996.05.02 |
申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
VAN ENGELEN, GERARD;VAN DIJK, CORNELIS D.;VAN KIMMENADE, JOHANNES M. M.;VAN EIJK, JAN |
分类号 |
G03F7/20;G03F9/00;H01L21/027;H01L21/68;(IPC1-7):G03B27/58;G03B27/42;G03B27/62 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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