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发明名称
SELF-ALIGN CONTACTING METHOD OF CAPACITOR STORAGE NODE
摘要
申请公布号
KR0151115(B1)
申请公布日期
1998.12.01
申请号
KR19890015369
申请日期
1989.10.25
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
HONG, KI-KAK
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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