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发明名称
PACKAGE PUSHER OF FABRICAING SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
KR0150695(B1)
申请公布日期
1998.12.01
申请号
KR19950012207
申请日期
1995.05.17
申请人
ANAM SEMICONDUCTOR CO.,LTD;ANAM INSTRUMENT CO.,LTD
发明人
SHIN, JAE-MOO;LEE, YOUNG-HWA
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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