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发明名称
SEMICONDUCTOR DEVICE TESTING APPARATUS AND ITS METHOD
摘要
申请公布号
KR0155392(B1)
申请公布日期
1998.12.01
申请号
KR19920000075
申请日期
1992.01.07
申请人
TOKYO ELECTRON LTD
发明人
SIBATA, JUNICHIRO
分类号
G01R31/26;G01R1/04;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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