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发明名称
METHOD OF FORMING NON-DEFECT AREA FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0154191(B1)
申请公布日期
1998.12.01
申请号
KR19940013494
申请日期
1994.06.15
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
LEE, WAN-KI
分类号
(IPC1-7):H01L21/000
主分类号
(IPC1-7):H01L21/000
代理机构
代理人
主权项
地址
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