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发明名称
PATTERNING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0148610(B1)
申请公布日期
1998.12.01
申请号
KR19940018404
申请日期
1994.07.28
申请人
HYUNDAI ELECTRONICS IND.CO.,LTD
发明人
HWANG, JOON;KIM, YONG-HWA
分类号
H01L21/3213;G03F7/38;H01L21/027;(IPC1-7):H01L21/30
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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