发明名称 PROCESS FOR REMOVING FINE PARTICLES FROM ARTICLES OF FLUORINE-CONTAINING RESIN
摘要 The invention provides a method for removing the fine particles deposited on an article of fluorine-containing resin, the method comprising conducting at least one of the procedures of: (i) maintaining the article of fluorine-containing resin at a high temperature, (ii) maintaining the article in the atmosphere of fluorine-type gas, and (iii) bringing the article into contact with a polar solvent or an aqueous solution of polar solvent. o
申请公布号 KR0157321(B1) 申请公布日期 1998.12.01
申请号 KR19900015320 申请日期 1990.09.26
申请人 TAIKIN KOGYO KK 发明人 AOMI, HIDEKI;SODA, TOMIZO;ITANO, MISUSHI
分类号 B08B3/08;B01J19/00;B29C71/00;B29K27/12;C08J7/00;C08J7/02;C08J7/12;C11D7/50;H01L21/304;(IPC1-7):C08J7/00 主分类号 B08B3/08
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