发明名称 |
Crystal holding apparatus |
摘要 |
In a crystal holding apparatus, a stepped engagement portion of a single crystal formed below a seed crystal is held by holding portions of a pair of lifting jigs so as to be pulled up. A lock mechanism consisting of a hook lever and an engagement pin is provided in order to prevent the closed lifting jigs from opening. Further, a portion of each holding portion to be contacted with a crystal is provided with a swing claw which is swingable about a horizontal pin. Accordingly, it becomes possible to reliably hold the crystal, to prevent generation of a defect in the crystal structure, and to prevent a material melt from being contaminated.
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申请公布号 |
US5843229(A) |
申请公布日期 |
1998.12.01 |
申请号 |
US19960763889 |
申请日期 |
1996.12.11 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
KIMURA, MASANORI;IINO, EIICHI;YAMAGISHI, HIROTOSHI;TAKANO, KIYOTAKA |
分类号 |
C30B15/32;C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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