发明名称 Crystal holding apparatus
摘要 In a crystal holding apparatus, a stepped engagement portion of a single crystal formed below a seed crystal is held by holding portions of a pair of lifting jigs so as to be pulled up. A lock mechanism consisting of a hook lever and an engagement pin is provided in order to prevent the closed lifting jigs from opening. Further, a portion of each holding portion to be contacted with a crystal is provided with a swing claw which is swingable about a horizontal pin. Accordingly, it becomes possible to reliably hold the crystal, to prevent generation of a defect in the crystal structure, and to prevent a material melt from being contaminated.
申请公布号 US5843229(A) 申请公布日期 1998.12.01
申请号 US19960763889 申请日期 1996.12.11
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 KIMURA, MASANORI;IINO, EIICHI;YAMAGISHI, HIROTOSHI;TAKANO, KIYOTAKA
分类号 C30B15/32;C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B35/00 主分类号 C30B15/32
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