APPARATUS FOR HEAT TREATMENT AND METHOD FOR MAKING THIN FILM USING SAID APPARATUS,申请号KR19900020491-传众专利搜索

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发明名称	APPARATUS FOR HEAT TREATMENT AND METHOD FOR MAKING THIN FILM USING SAID APPARATUS
摘要
申请公布号	KR0151782(B1)	申请公布日期	1998.12.01
申请号	KR19900020491	申请日期	1990.12.13
申请人	TOKYO ELECTRON CO.,LTD	发明人	HATORI, KODOBUKI
分类号	H01L21/223;C23C16/24;C23C16/44;C23C16/455;C30B25/14;H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/00	主分类号	H01L21/223
代理机构		代理人
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