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发明名称
FERROELECTRIC CAPACITOR AND ITS FABRICATION METHOD
摘要
申请公布号
KR0151058(B1)
申请公布日期
1998.12.01
申请号
KR19950015921
申请日期
1995.06.15
申请人
SAMSUNG ELECTRONICS CO.,LTD
发明人
SHIN, HWA-SUCK
分类号
H01L21/328;(IPC1-7):H01L21/328
主分类号
H01L21/328
代理机构
代理人
主权项
地址
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