Method of developing an adhesive and a rotary holding table for carrying out the same method

摘要

A method and apparatus for effectively developing an adhesive in a storage disc including differentiating a suction force applied from a surface of a rotary holding table from a drawing force applied from a boss. The method includes holding a storage disc on a rotary table by suction, the storage disc including two disc-shaped resin substrates each having a central hole and adhesive interposed therebetween. A boss of the rotary holding table is inserted into the central holes of the two disc-shaped resin substrates, and individual suction and drawing passages are provided for holding the storage disc on the rotary table and for drawing the adhesive by way of the boss, respectively.