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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS FABRICATION METHOD
摘要
申请公布号
KR0150407(B1)
申请公布日期
1998.12.01
申请号
KR19880014584
申请日期
1988.11.07
申请人
HITACHI LTD;HITACHI VLSI ENGINEERING LTD
发明人
CHUCHIYA, OSAMU;SWANAI, NAOKACHU;KASAMA, YASUHIRO;OSHIMA, KAZUYOSHI;TAKANO, MITSUHIRO;KOMATSU, NOBUO;UDO, SHINJI
分类号
H01L27/10;H01L21/336;H01L21/8242;H01L27/105;H01L27/108;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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