SEMICONDUCTOR FABRICATION DEVICE,申请号KR19950019042-传众专利搜索

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发明名称	SEMICONDUCTOR FABRICATION DEVICE
摘要
申请公布号	KR0155841(B1)	申请公布日期	1998.12.01
申请号	KR19950019042	申请日期	1995.06.30
申请人	SAMSUNG ELECTRONICS CO.,LTD	发明人	KIM, HEI-JAE;KIM, DONG-HO
分类号	H01L21/28;(IPC1-7):H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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