发明名称 |
Position sensor system for substrate holders |
摘要 |
The position sensor (20) and method of the present invention allows detecting proper placement of substrate holders (25) in a processing apparatus (35), and can also be used to detect displacement of the substrates (70) within the substrate holder (25). The position sensor (20) comprises (a) an optical emitter (120) capable of emitting a light beam, (b) an optical sensor (125) capable of sensing the light beam emitted by the optical emitter (120), and (c) a light regulator (130) in a path (135) of the light beam that is capable of blocking the light beam from the optical sensor when the substrate holder (25) is improperly positioned in the process chamber (40).
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申请公布号 |
US5844683(A) |
申请公布日期 |
1998.12.01 |
申请号 |
US19960651227 |
申请日期 |
1996.05.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PAVLOSKI, ANDREW;SKLYAR, DMITRY;ROLNY, ANDREJ |
分类号 |
H01L21/677;H01L21/00;H01L21/68;(IPC1-7):G01B11/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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