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发明名称
ELECTRON BEAM EXCITATION ION SOURCE
摘要
申请公布号
KR0158875(B1)
申请公布日期
1998.12.01
申请号
KR19900001933
申请日期
1990.02.16
申请人
TOKYO ELECTRON LTD
发明人
TAKAYAMA, NAOKI;KAWAMURA, KOHEI;KOSHIISHI, AKIRA
分类号
H01J27/20;H01J27/02;H01J37/08;H01L21/027;H01L21/265;H01L21/30;(IPC1-7):H01J27/02
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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