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发明名称
MANUFACTURING APPARATUS OF SEMICONDUCTOR
摘要
申请公布号
KR0152912(B1)
申请公布日期
1998.12.01
申请号
KR19940021550
申请日期
1994.08.30
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
HAN, BONG-SUK
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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