ROTATION UNIT OF SOG COATING APPARATUS,申请号KR19940035659U-传众专利搜索

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发明名称	ROTATION UNIT OF SOG COATING APPARATUS
摘要
申请公布号	KR0128231(Y1)	申请公布日期	1998.12.01
申请号	KR19940035659U	申请日期	1994.12.24
申请人	LG SEMICONDUCTOR CO.,LTD	发明人	JUNG, SUNG-HAK;JIN, HEE-CHANG
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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