THIN-FILM FORMATION DEVICE AND METHOD,申请号KR19950022799-传众专利搜索

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发明名称	THIN-FILM FORMATION DEVICE AND METHOD
摘要
申请公布号	KR0152369(B1)	申请公布日期	1998.12.01
申请号	KR19950022799	申请日期	1995.07.28
申请人	NIPPON DENKI KK;ANERUBA KK	发明人	SUGAI, KAZUMI;KOBAYASHI, AKIKO;KISHIDA, SHUNJI
分类号	G01B7/004;C23C16/52;G01B11/06;H01L21/205;H01L21/31;(IPC1-7):H01L21/31	主分类号	G01B7/004
代理机构		代理人
主权项
地址

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