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发明名称
ELECTRON FLOOD GUN
摘要
申请公布号
KR0152932(B1)
申请公布日期
1998.12.01
申请号
KR19950028990
申请日期
1995.09.05
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
KIM, ILL-KWEON
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
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地址
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