发明名称 forming a layer
摘要 PCT No. PCT/GB95/00259 Sec. 371 Date Oct. 2, 1995 Sec. 102(e) Date Oct. 2, 1995 PCT Filed Feb. 2, 1995 PCT Pub. No. WO95/22170 PCT Pub. Date Aug. 17, 1995The invention relates to apparatus for use in a process in which a layer is formed on a surface of a workpiece and then forced into underlying voids. The apparatus for applying elevated pressure to the workpiece 1 comprises a chamber 103 (which includes a workpiece support 109a) means 108 for flooding the chamber 103 with liquid to immerse a workpiece 1 on the support 109a and means for applying a pulse of elevated pressure to the liquid and hence the workpiece. These means may include a liquid reservoir 102, which shares a common flexible wall 101 with the chamber 103, and electrodes 100 and 104 to which a high voltage pulse can be supplied to create a shock in the liquid of reservoir 102 which is transmitted to the liquid in 103 via the wall 101.
申请公布号 US5843535(A) 申请公布日期 1998.12.01
申请号 US19950530195 申请日期 1995.10.02
申请人 TRIKON TECHNOLOGIES LIMITED 发明人 DOBSON, CHRISTOPHER DAVID
分类号 H01L21/28;B23K20/02;H01L21/00;(IPC1-7):B05D3/02;B06B1/00;B05C3/00 主分类号 H01L21/28
代理机构 代理人
主权项
地址