Menetelmä pinnan muodon mittaamiseksi ja mittauslaitteisto

摘要

The invention concerns a method for measuring the shape of a surface and a measuring arrangement using the method. On the surface 20 being investigated a system of grid lines 22 resembling a moiré pattern is formed and the shape of the surface is determined by a line figure of interference type, which is formed by a reference grid system and by the grid system 22 reflected from the surface. The measurement arrangement comprises at least two different grid system elements 14 for creation of the grid system of desired width on the investigated surface 20, wherein the grid system 22 comprises parallel grid systems derived from the different grid system elements 14. <IMAGE>