COOLING GAS SUPPLY DEVICE,申请号KR19950002670U-传众专利搜索

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发明名称	COOLING GAS SUPPLY DEVICE
摘要
申请公布号	KR0127586(Y1)	申请公布日期	1998.12.01
申请号	KR19950002670U	申请日期	1995.02.18
申请人	LG SEMICONDUCTOR CO.,LTD	发明人	SEO, BUM-MOON
分类号	H01L21/20;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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