EPITAXY BOAT AND METHOD FOR LIQUID PHASE EPITAXIAL DEPOSIT OF CDHGTE
摘要
The invention concerns an epitaxy boat for the liquid phase epitaxial deposit of a CdHgTe layer on a heterosubstrate without any risk of dissolving the heterosubstrate in the epitaxy solution. Said boat comprises two horizontal slides mutually offset such that the tellurium solution is brought above a selected zone of the heterosubstrate. The invention also concerns a method for depositing a CdHgTe layer on a heterosubstrate using said boat. The invention is applicable to the production of infrared radiation detectors.
申请公布号
WO9853123(A1)
申请公布日期
1998.11.26
申请号
WO1998FR01013
申请日期
1998.05.20
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;PELLICIARI, BERNARD;POLGE, BERNARD