发明名称 EPITAXY BOAT AND METHOD FOR LIQUID PHASE EPITAXIAL DEPOSIT OF CDHGTE
摘要 The invention concerns an epitaxy boat for the liquid phase epitaxial deposit of a CdHgTe layer on a heterosubstrate without any risk of dissolving the heterosubstrate in the epitaxy solution. Said boat comprises two horizontal slides mutually offset such that the tellurium solution is brought above a selected zone of the heterosubstrate. The invention also concerns a method for depositing a CdHgTe layer on a heterosubstrate using said boat. The invention is applicable to the production of infrared radiation detectors.
申请公布号 WO9853123(A1) 申请公布日期 1998.11.26
申请号 WO1998FR01013 申请日期 1998.05.20
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;PELLICIARI, BERNARD;POLGE, BERNARD 发明人 PELLICIARI, BERNARD;POLGE, BERNARD
分类号 C30B19/04;C30B19/06 主分类号 C30B19/04
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