发明名称 DEVICE FOR DRYING SUBSTRATES
摘要 The invention relates to a device for drying disk substrates (3) by means of exposure to ultraviolet light. A glass plate (11) lies on the disk substrate (3) during this process. The aim of the invention is to provide simple technical means for ensuring a low level of waste and a better quality disk substrate with a device which is easy to handle. To this end, the inventive device has an upper part (6) which can be raised and lowered, for lowering the glass plate onto the disk substrate (3), said disk substrate lying on a lower part (23).
申请公布号 CA2288124(A1) 申请公布日期 1998.11.26
申请号 CA19982288124 申请日期 1998.05.14
申请人 STEAG HAMATECH AG 发明人 WEBER, KLAUS;SPEER, ULRICH
分类号 F26B3/04;F26B3/28;F26B15/04;G11B7/26;(IPC1-7):G11B7/26 主分类号 F26B3/04
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