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发明名称
Herstellungsverfahren von einer Halbleitervorrichtung mit einem wasserfreien ferroelektrischen Dünnfilm
摘要
申请公布号
DE69321641(D1)
申请公布日期
1998.11.26
申请号
DE19936021641
申请日期
1993.03.18
申请人
MOTOROLA, INC., SCHAUMBURG, ILL., US
发明人
MANIAR, PAPU, AUSTIN, TEXAS 78729, US
分类号
H01L27/10;C23C18/12;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;H01L41/22;H01L41/24;(IPC1-7):H01L21/316
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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