A sealed drive system for transferring rotary motion into a vacuum chamber is disclosed. The system has a housing (14) with a flange secured to a wall (10) of the chamber around an aperture (12) in the wall. The housing (14) houses at least one bearing (18, 20), and a rotary shaft (24) having an end (26) which passes through the aperture (12) in the chamber wall (10). The housing (14) further houses at least one magnetic circuit including a magnetic fluid (38) which forms a seal around the rotary shaft (24). In order to provide a particularly compact arrangement, the housing (14) also houses an electric motor (44) which is arranged to rotate the shaft (24).
申请公布号
WO9853231(A1)
申请公布日期
1998.11.26
申请号
WO1998GB01376
申请日期
1998.05.14
申请人
ADVANCED FLUID SYSTEMS LIMITED;BROOKS, DOUGLAS, ALAN;BOGUSLAVSKIY, VADIM