| 摘要 |
A substrate for use in a Coriolis acceleration and angular rate sensor comprises a pair of accelerometers (32) having generally parallel force sensing axes (38). The accelerometers (32) are mounted in a dither frame (30) for dithering along a dither axis (392,393) perpendicular to the force sensing axes (38). A pair of linking means (72) is formed in the substrate exteriorly of the region between the two accelerometers (32), the linking means (72) interconnecting the accelerometers to allow them to dither in phase and at the same frequency. Each linking means (72) may comprise a link (74,415) connected to the dither frame (30) via a pivot flexure (82,420). <IMAGE> |
