Apparatus for manufacturing a single crystal

摘要

Crystalliser grows single crystals (7) from semiconductor melt (2) according to Czochralski method. In the original assembly, a heat shield (8) screens the growing crystal, and the inner cooler has an upper part with coolant channels (9a) and a thermally-conductive lower part (9b). Pref. upper and lower parts are soft soldered, the coolant is water and the lower part silver or silver coated. Clearance between the lower edge of the cooling body and the crystallisation front of the crystal is 25-60 mm. The inner surface of the cooler facing the crystal, is heat absorbent; the outer reflects thermal radiation, e.g. is gold.