Capacitive transducer feedback controlled by means of electrostatic force and method for controlling the profile of the tranducing element in the transducer,申请号EP19940306067-传众专利搜索

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发明名称	Capacitive transducer feedback controlled by means of electrostatic force and method for controlling the profile of the tranducing element in the transducer
摘要
申请公布号	EP0639755(B1)	申请公布日期	1998.11.25
申请号	EP19940306067	申请日期	1994.08.17
申请人	VAISALA OY	发明人	RYHANEN, TAPANI
分类号	G01L9/12;G01D5/241;G01L9/00;G01L11/00;G01P15/13;G05B6/02;H01L41/09;(IPC1-7):G01L11/00;G01D3/06	主分类号	G01L9/12
代理机构		代理人
主权项
地址

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