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经营范围
发明名称
Exposure method
摘要
申请公布号
EP0361934(B1)
申请公布日期
1998.11.25
申请号
EP19890309915
申请日期
1989.09.28
申请人
CANON KABUSHIKI KAISHA
发明人
OHTA, HIROHISA;OZAWA, KUNITAKA;KAWAKAMI, EIGO;UZAWA, SHUNICHI
分类号
G03F7/20;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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