发明名称 Photosensitive resin composition
摘要 <p>There are disclosed a photosensitive resin composition which comprises (A) a polyamic acid having recurring units represented by the formula (I): <CHEM> wherein R<1> represents <CHEM> and R<2> represents a divalent organic group, and (B) an acryl compound having an amino group, and also a photosensitive resin composition for an i-line stepper which further comprises a photoinitiator in addition to the photosensitive resin composition.</p>
申请公布号 EP0642057(B1) 申请公布日期 1998.11.25
申请号 EP19940306413 申请日期 1994.08.31
申请人 HITACHI CHEMICAL CO., LTD. 发明人 HAGIWARA, HIDEO;KAJI, MAKOTO;NUNOMURA, MASATAKA
分类号 G03F7/008;C08G73/10;G03F7/012;G03F7/027;G03F7/028;G03F7/037;G03F7/038;G03F7/075;H01L21/027;H01L21/312;H05K1/00;(IPC1-7):G03F7/037 主分类号 G03F7/008
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