ULTRASONIC CLEANING METHOD AND DEVICE THEREFOR,申请号JP19970117802-传众专利搜索

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发明名称	ULTRASONIC CLEANING METHOD AND DEVICE THEREFOR
摘要
申请公布号	JPH10309548(A)	申请公布日期	1998.11.24
申请号	JP19970117802	申请日期	1997.05.08
申请人	TOPPAN PRINTING CO LTD	发明人	NAKASO NOBUTAKA
分类号	B08B3/12;H01L21/304;(IPC1-7):B08B3/12	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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