| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitoring device for monitoring the operation of a substrate-carrying system in a substrate processor, such as a semiconductor manufacturing device, and facilitating quick countermeasures when troubles occur. SOLUTION: This monitoring device is provided with a controlling means 54 for transmitting a control signal to a driving source 82 for moving a movable member 72 of a carrying system 74 to a target position, and a detecting means 92 arranged outside a vacuum chamber for detecting the actual position of the movable member which is moved and stopped at the target position decided by the controlling means 54. Then, data corresponding to the target position are compared with the data corresponding to the actual position of the movable member detected by the detecting means so that deflection can be calculated, and whether or not the deflection is within a prescribed allowable range is judged. When the deflection exceeds the allowable range, it is judged that abnormality has been generated in the operation of the carrying system. |
