Methods of making parylene AF4 using novel that result in reduced cost. Low dilution technology may used to provide parylene AF4 in substantially improved yields. The relative amount of transition metal catalyst can be decreased. The amount of undesired byproduct is also reduced.
申请公布号
US5841005(A)
申请公布日期
1998.11.24
申请号
US19970818584
申请日期
1997.03.14
申请人
DOLBIER, JR., WILLIAM R.;DUAN, JIAN-XIN;ROCHE, ALEX J.
发明人
DOLBIER, JR., WILLIAM R.;DUAN, JIAN-XIN;ROCHE, ALEX J.