发明名称 |
Method of improving the spectral response and dark current characteristics of an image gathering detector |
摘要 |
A method of simultaneously improving the spectral response and dark current characteristics of an image gathering detector is disclosed. The method uses an excimer laser to redistribute and activate ion implanted dopant species in the backside of an image gathering device such as a backside-illuminated CCD. Alternately, the excimer laser is used to incorporate dopants from a gaseous ambient into the backside of the image gathering device and simultaneously redistribute and activate the dopants. The redistribution of the dopant is controlled by the laser pulses and provides for a peak dopant concentration at the back surface of the image gathering device which provides for improved spectral response and simultaneously improves dark current characteristics.
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申请公布号 |
US5840592(A) |
申请公布日期 |
1998.11.24 |
申请号 |
US19940273445 |
申请日期 |
1994.07.05 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
RUSSELL, STEPHEN D.;SEXTON, DOUGLAS A.;KELLEY, EUGENE P.;REEDY, RONALD E. |
分类号 |
G01R31/311;G09G3/00;H01L27/148;H01L31/18;(IPC1-7):H01L21/265 |
主分类号 |
G01R31/311 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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