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发明名称
CONTAMINATION INSPECTION APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10313026(A)
申请公布日期
1998.11.24
申请号
JP19970122714
申请日期
1997.05.13
申请人
SEIKO EPSON CORP
发明人
IGARASHI HIROSHI
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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