发明名称 |
BONDING APPARATUS, BONDING, AND MANUFACTURE OF SEMICONDUCTOR DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a bonding apparatus and method which can eliminate the need for an operator to set bonding conditions. SOLUTION: The bonding apparatus automatically calculates bonding conditions including a central position of a semiconductor chip 1 and a central position of a die pad 3a on the basis of image data detected by a camera 12. Accordingly, it is unnecessary for an operator to set the bonding conditions in the bonding apparatus. Further, since position control of a housing 7 is carried out based on the bonding conditions calculated by the apparatus, the semiconductor chip 1 can be accurately mounted on a lead frame 3 at a suitable position.</p> |
申请公布号 |
JPH10313013(A) |
申请公布日期 |
1998.11.24 |
申请号 |
JP19970119579 |
申请日期 |
1997.05.09 |
申请人 |
MITSUBISHI ELECTRIC CORP;MITSUBISHI DENKI ENG KK |
发明人 |
KANDA MAKOTO;YAMAMOTO MASAHIKO |
分类号 |
H01L21/677;H01L21/52;H01L21/68;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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