发明名称 BONDING APPARATUS, BONDING, AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a bonding apparatus and method which can eliminate the need for an operator to set bonding conditions. SOLUTION: The bonding apparatus automatically calculates bonding conditions including a central position of a semiconductor chip 1 and a central position of a die pad 3a on the basis of image data detected by a camera 12. Accordingly, it is unnecessary for an operator to set the bonding conditions in the bonding apparatus. Further, since position control of a housing 7 is carried out based on the bonding conditions calculated by the apparatus, the semiconductor chip 1 can be accurately mounted on a lead frame 3 at a suitable position.</p>
申请公布号 JPH10313013(A) 申请公布日期 1998.11.24
申请号 JP19970119579 申请日期 1997.05.09
申请人 MITSUBISHI ELECTRIC CORP;MITSUBISHI DENKI ENG KK 发明人 KANDA MAKOTO;YAMAMOTO MASAHIKO
分类号 H01L21/677;H01L21/52;H01L21/68;(IPC1-7):H01L21/52 主分类号 H01L21/677
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