| 摘要 |
PROBLEM TO BE SOLVED: To make feasible of manufacturing fine patterns on an insulating substrate stably with high reproducibility by cutting a conductive thin film in contact with the insulating substrate giving a given contact force. SOLUTION: An insulating substrate 102 is fitted onto an xy stage 105. The xy stage 105 is driven by both x directional and y directional driving signals outputted from a computer 106, so as to relatively move a conductive thin film 101 and the insulating suhstrate 102 in the xy directions to a probe 104. When the xy stage 105 is driven in the xy directions in the state of contact force given at the creeping level into the conductive thin film 101 until the front end of the probe 104 reaches the insulating substrate 102 surface, the front end of the probe 104 cuts the conductive thin film 101, thereby enabling fine patterns 112 to be formed. At this point, the computer 106 outputs x and y directional driving signals so that the fine processed patterns in arbitrary shapes of fine lines and trenches assembled together may be formed. |
