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发明名称
METHOD FOR DIAGNOSING DETERIORATION AND LIFE OF ELECTRONIC DEVICE AND DEVICE THEREFOR
摘要
申请公布号
JPH10313034(A)
申请公布日期
1998.11.24
申请号
JP19970137930
申请日期
1997.05.12
申请人
TOSHIBA CORP
发明人
SASAKI KEIICHI
分类号
H01L21/66;H01L21/3205;H01L23/52;(IPC1-7):H01L21/66;H01L21/320
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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