| 摘要 |
PROBLEM TO BE SOLVED: To provide electron emitting elements sufficiently emitting electrons and easily manufacture them with uniform quality by growing diamond lugs each having a shape capable of emitting electrons and a sharp tip section on the surface of a diamond substrate. SOLUTION: The surface of a diamond substrate preferably has a (100) plane, a (110) plane, or a (111) plane, and diamond lugs 26 on it are surrounded by the (111) plane, or the (111) plane and (100) plane, or the (100) plane. A cylindrical upheaval portion 25 integrally formed on the substrate 21 of a high- crystallinity Ib type or natural diamond single crystal is used as a nucleus, and each lug portion 26 is obtained by vapor phase synthetic epitaxial growth. The lug portion 26 is surrounded by an inherent crystalline plane governed by the symmetric property of a crystalline structure, it has electrical and mechanical characteristics peculiar to a single crystal, it is sharpened at the atomic level, it has a shape determined by the plane index of the surface of the substrate 21, and the surface of the lug portion 26 is stable in energy. |
