MATERIAL EVALUATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a material evaluating method whereby characteristics of various materials can be evaluated easily and quickly with good accuracy and certainty even if the materials are present in little amounts. SOLUTION: A solution or gas is provided in contact with the sensor surface 5 of a light scan type two-dimensional concentration distribution measuring device having a sensor surface 7 on one side of a semiconductor substrate 5 and designed to apply probing light 3 to the semiconductor substrate 5. Microscopic changes in the distribution of material concentrations or a physical- property parameters, which are caused inside the solution 24 or gas 43 when a material 23 to be evaluated is provided in contact with the solution 24 or gas 43, are detected.