Three-dimensional measuring apparatus and three-dimensional measuring method

摘要

The three-dimensional measuring apparatus of the present invention includes an optical beam scanning unit for scanning a projected-and-depressed surface of an object with an optical beam while controlling the scanning operation, and a detector unit for receiving a reflected optical beam reflected by the projected-and-depressed surface through the scanning operation and for thereby measuring height information on the projections and depressions of the object, in which noise information due to noise generated during the control of the scanning operation with the optical beam is prevented from being transmitted as the height information from the detector unit.