| 摘要 |
PROBLEM TO BE SOLVED: To stop carrying a wafer without doing damage to it by immediately detecting abnormality in the case when breakage is caused on a wafer carrier arm by sealing and fixing a pipe for vacuum adsorption passed through a groove formed along a central line on the lower surface side of the wafer carrier arm by using resin. SOLUTION: A wafer carrier arm 4 is clamped in a carrier robot main body 6 by an arm fixing plate 1 and installed on a carrier robot. A wafer guide 3 to be a stopper of a wafer to be carried is installed on the upper surface side of the wafer carrier arm 4, and a groove to pass a pipe 11 for vacuum adsorption to suck the wafer along its central line is formed on the arm bottom surface side. This groove is connected to an adsorption hole 12 opened on the upper surface side of the arm, sealed by flowing in resin 5 and buries and fixes the pipe 11 for vacuum adsorption on a ceramic plate. Consequently, it is possible to facilitate detection of vacuum leakage, etc., due to breakage in the case when impact is applied on the arm and to immediately stop carriage of the wafer. |
