| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure a sample even when the incident angle on the sample of a primary X-ray is increased by protruding and recessing an attenuator to the passage of the primary X-ray between an X-ray source and the sample according to the incident angle on the sample of the primary X-ray. SOLUTION: The primary X-ray 2B from an X-ray tube 1 spectrally divided by a spectroscope 3 is emitted to a sample 5 fixed to a sample stage 4, and the intensity of a secondary X-ray (fluorescent X-ray) 7 generated from the sample 5 is measured by a detector 8. When the incident angle 8 of a primary X-ray 2C on the sample 5 is increased, the intensity of the fluorescent X-ray 7 is increased, so that a precise measurement can not be performed. Thus, a control means 12 controls a protruding and recessing means 10 to protrude a comb type attenuator 9A to the route of the primary X-ray 2B, so that the primary X-ray 2C incident on the sample 5 is attenuated thereby. When the incident angleθis further increased, and the intensity of the fluorescent X-ray 7 can not be decreased even by use of the attenuator 9A, a double comb type attenuator 9B having a high attenuation factor is protruded to the route of the primary X-ray 2B instead of the attenuator 9A.
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