METHOD AND APPARATUS FOR POLISHING METAL FILM,申请号JP19970123940-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR POLISHING METAL FILM
摘要
申请公布号	JPH10312981(A)	申请公布日期	1998.11.24
申请号	JP19970123940	申请日期	1997.05.14
申请人	NEC CORP	发明人	KUBO TORU;SUZUKI MIEKO
分类号	H01L21/306;H01L21/304;H01L21/321;H01L21/3213;(IPC1-7):H01L21/304	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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