| 摘要 |
PROBLEM TO BE SOLVED: To speedily and securely compensate the temperature lowering of a sample due to adiabatic expansion, at the time of evacuating an air-lock chamber. SOLUTION: A window 12 is provided to an air lock chamber 8, connected to a vacuum and thermostatic plotting room 1 through a first gate valve 7, this window 12 is closed airtightly by a light-transmitting member 13, a lamp 14 irradiating infrared rays to the outside of this member 13 and the infrared rays from this lamp 14 is irradiated on a sample 5 placed within the chamber 8 to prevent the temperature lowering of the sample 5 due to adiabatic expansion. |
