发明名称 PACKAGING METHOD OF SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To make feasible of lowering the electric resistance also realizing the electric conduction without fail, by a method wherein a resin containing elastically deforming conductive particles is provided on electrodes of a semiconductor device and wiring patterns of a substrate, so that the conductive particles may be pressurized to be single layered for connection between the semiconductor device and the substrate. SOLUTION: Wiring patterns 5 are formed in the shape corresponding to the electrodes 2 of a semiconductor device 1 on a glass substrate 6. Next, a resin 4 containing Au plated conductive particles 3 is screen-printed on the positions corresponding to the electrodes 2 on the patterns 5 on the balls. Later, the glass substrate 6 or the semiconductor 1 is coated with an epoxy base adhesive 7 and after making alignment of the electrodes 2 of the semiconductor device 1 with the wiring patterns 5, and adhesive 7 is cured while pressurizing the semiconductor device 1 to be fixed. At this point, the conductive particles 3 are left as one layer only between the semiconductor device 1 and the substrate 6. Furthermore, the squeeze of the conductive particles 3 is specified to be within the range of 10-50% of the particle diameter thereof for lowering the connecting resistance.</p>
申请公布号 JPH10313023(A) 申请公布日期 1998.11.24
申请号 JP19980167421 申请日期 1998.06.15
申请人 SEIKO EPSON CORP 发明人 YAMAZAKI YASUO
分类号 H01L21/60;H05K3/32;(IPC1-7):H01L21/60 主分类号 H01L21/60
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