| 摘要 |
<p>A surface inspection instrument (1) comprising a light source (11) for projecting light onto the surface of an object (2) to be inspected, an objective lens (12) opposed to the surface of the object (2) for receiving light emitted from the light source (11) and reflected by the surface of the object (2) a light sensing means (13) for sensing the intensity of light that is incident parallel with the optical axis of the objective lens (12) out of the reflected light passing through the objective lens (12), and a slit (29) provided in an optical path between the objective lens (12) and the light sensing means (13). The light sensing range on the surface of the object (2) is limited by the slit (29), and the surface state is accurately and quantitatively inspected irrespective of the shape of the object.</p> |
