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发明名称
Peripherieabdichtung für Halbleiterplättchen und verfahren zu deren Verwendung
摘要
申请公布号
DE69032189(T2)
申请公布日期
1998.11.19
申请号
DE19906032189T
申请日期
1990.05.10
申请人
GENUS, INC., MT. VIEW, CALIF., US
发明人
STUDLEY, DAVID K., SUNNYVALE, CA 94087, US;KELLER, ERNST, SUNNYVALE, CA 94086, US
分类号
C23C16/44;C23C16/458;H01L21/205;H01L21/285;(IPC1-7):H01L21/00
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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