CONNECTOR AND PROBING SYSTEM

摘要

A probing system which can realize the probing of a narrow-pitch multipin object stably under low-load conditions without giving any damage to the object and, at the same time, can transmit the results of probing at a high speed, namely, in the form of high-frequency electric signals. The system comprises: a supporting member for a connector; a multilayered film provided with contact terminals each having a sharpened tip and arranged in a probing-side area, lead-out wirings each being electrically connected to the respective terminal, and a grounding layer formed on the wiring with an insulating layer in between; a frame fixed to the rear side of the multilayered film; a pressing member which attaches the frame to the multilayered film with a section for projecting the probing-side area so as to eliminate the looseness of the area in the multilayered film; a contact pressure imparting means which imparts a contact pressure to the pressing member through the supporting member for bringing the tip of each contact terminal into contact with each electrode; and a compliance mechanism which parallels the tip faces of the contact terminals in compliance with the surfaces of the electrodes for bringing the tip faces of the contact terminals into contact with the surfaces of the electrodes.